Do you face any of these problems?

  • Need to improve bonding reliability of wire bonding
  • Need to improve adhesion of underfill
  • Need to improve flip-chip performance, solder bump performance, and die attach performance by cleaning/modifying wafers
  • Need to improve the quality of solder bumps by removing resin residue on the wafer bump top
  • Need to improve pad quality by removing plastic residue in via holes (desmear)

Our plasma cleaner contributes to quality improvement of various processes

Image: Case studies of plasma application in packaging process

▲Case studies of plasma application in packaging process

Target machinery and target packages

  • Large vacuum chamber increases the number of PCBs that can be treated simultaneously, improving productivity
  • Unique plasma monitoring function monitors plasma stability in real time to avoid damage to PCB due to abnormal discharge
  • Newly added traceability function helps assure process quality
  • Compatible with φ300 mm wafer (with or without ring), contributes to wafer level packaging
  • Improves metal bonding and resin adhesion by cleaning/modifying PCB surfaces with plasma
  • Improves bonding performance in wire bonding and flip-chip bonding of various metals
  • Improves adhesion of molded resin encapsulants and underfill significantly
  • Unique plasma monitoring function monitors plasma stability in real time to avoid damage to PCB due to abnormal discharge

Solutions

Plasma cleaner application case studies for each process


1) Ensures wire bonding can be performed on an ultra-thin gold-plated electrode for consistent quality


Image: Ensures wire bonding can be performed on an ultra-thin gold-plated electrode for consistent quality

2) Ensures consistent bonding quality and improves bump retention in flip-chip, Au-Au and Au-Cu bonding by approximately three times


Image: Ensures consistent bonding quality
Graph: Bump residual ratio after die shear

3) Approximately doubles mold resin adhesion strength, eliminates delamination and improves reliability


Mold resin adhesion strength (N)

4) Reduces filling time by 40% and improves productivity. Ensures uniformity of fillet shape and improves void-free quality


Image: Reduces filling time by 40% and improves productivity

5) Remove the smear after laser via and improves PoP bonding


Image: Remove the smear after laser via and improves PoP bonding

Related products


Plasma Cleaner PSX307A

Plasma Cleaner

PSX307A

Large chamber. PCB/wafer selectable.

See Details

Plasma Cleaner PSX307

Plasma Cleaner

PSX307

Equipped with a loader and unloader. For PCBs.

See Details

Inquiries

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