Device-related Systems – PSX307/PSX307-HSA Plasma Cleaner
Plasma Cleaner PSX307/PSX307-HSA
A parallel plate plasma cleaner for PCBs with automatic transfer
PSX307/PSX307-HSA Plasma Cleaner
Main Features
- Chamber configuration that achieves both in-plane uniformity and etching rate
- Our original lifting unit can handle PCBs that are thin and warped and PCBs with components on the backside
- Original plasma monitor function avoids abnormal discharge and enables damage-free processing
- Traceability is ensured due to online operation
PSX307 is a parallel plate plasma cleaner for PCBs with automatic transfer. Loader/unloader and in-line specifications can be selected. One of the following 2 models can be selected depending on the PCB dimensions.
S type PCB dimensions: L 50 mm × W 20 mm to L 250 mm × W 75 mm
M type PCB dimensions: L 50 mm × W 20 mm to L 330 mm × W 120 mm
S type PCB dimensions: L 50 mm × W 20 mm to L 250 mm × W 75 mm
M type PCB dimensions: L 50 mm × W 20 mm to L 330 mm × W 120 mm
PSX307/PSX307-HSA Plasma Cleaner
Strengths and Features
Application example（Substrate level）
Bondability
Adhesion
Maintenance support application PSX307-HSA
Supports predictive maintenance by visualizing equipment status of plasma cleaner (PSX307)
- Realize maintenance at the optimal time by visualizing health score of equipment.
- Connect up to 100 machines to enable operation as planned
- Applicable to existing plasma cleaners (PSX307). No need for special modifications
Display a list of each chambers’ abnormality score
Analysis of abnormality score and abnormality relation score of each parts
- Health score transition; display status of past 30 days
- Abnormality relation score of each parts; display related parts
System configuration
Related solutions
Main Specifications
| PSX307 Plasma Cleaner | |
|---|---|
| Cleaning Method | Parallel plate RF back-sputtering method
|
| Gas for electrical discharge | Ar ( option : O2 ) |
| Power Source | 1-phase AC 200 V , 2.00 kVA ( Full Load 5.00 kVA ) |
Footnotes
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